Importance

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Abstract

According to one embodiment, a semiconductor device includes a substrate, a semiconductor layer, a source electrode, a drain electrode, first insulating portion and second insulating portions. The semiconductor layer includes an oxide and is separated from the substrate in a first direction. The source electrode is electrically connected to the semiconductor layer. The drain electrode is electrically connected to the semiconductor layer and is arranged with the source electrode in a second direction crossing the first direction. The first insulating portion is provided between the substrate and the semiconductor layer. The semiconductor layer is provided between the first and second insulating portions. The first insulating portion includes a first silicon nitride layer, and a first aluminum oxide layer stacked with the first silicon nitride layer. The second insulating portion includes a second aluminum oxide layer, and a second silicon nitride layer stacked with the second aluminum oxide layer.

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First Claim