Cryopump and method of operating the cryopump

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United States of America Patent

PATENT NO 10273949
APP PUB NO 20170145998A1
SERIAL NO

15422878

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Abstract

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A method of operating a cryopump includes: cooling a cryopanel from an initial temperature higher than a cryogenic temperature for a vacuum pumping operation to the cryogenic temperature by using a refrigerator; and after the cooling, initiating the vacuum pumping operation, in which the cooling includes providing a cooling relief effect selectively to a high-temperature stage of the refrigerator.

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Patent Owner(s)

  • SUMITOMO HEAVY INDUSTRIES LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Takahashi, Kakeru Tokyo, JP 27 25

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