Probe systems and methods for automatically maintaining alignment between a probe and a device under test during a temperature change

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United States of America Patent

PATENT NO 10365323
APP PUB NO 20170146594A1
SERIAL NO

15339419

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Probe systems and methods for automatically maintaining alignment between a probe and a device under test (DUT) during a temperature change. The methods include collecting an initial image of a planar offset fiducial and determining an initial height reference of a height offset fiducial. The methods further include changing a temperature of the DUT, automatically maintaining a planar alignment between a probe and the DUT during the changing, and automatically maintaining a height alignment between the probe and the BUT during the changing. The probe systems include a chuck, which defines a support surface configured to support a substrate that includes the DUT, and a probe head assembly, which includes a probe configured to contact a corresponding contact pad of the DUT. The probe systems further include a substrate thermal module, which is configured to regulate a temperature of the DUT, and a controller programmed to execute the methods.

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Patent Owner(s)

  • FORMFACTOR BEAVERTON, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Andrews, Peter Douglas Beaverton, US 1 2
Hess, David Randle Beaverton, US 3 3
Newton, David Michael Beaverton, US 1 2

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