X-ray generation device, X-ray device, and method for manufacturing structure

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United States of America Patent

PATENT NO 10645788
APP PUB NO 20170150589A1
SERIAL NO

15129677

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Abstract

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An X-ray generation device that emits X-rays due to an electron beam emitted from a cathode arriving at a target, includes: first and second high voltage power supplies that are connected in series between the cathode and the target, and both of which accelerate the electron beam; and wherein the second high voltage power supply outputs a second high voltage so that, with respect to a phase of a ripple component of a first high voltage generated by the first high voltage power supply, a phase of a ripple component of the second high voltage generated by the second high voltage power supply has a predetermined relationship.

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATIONTOKYO 140-8601

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Endo, Takeshi Yokohama, JP 213 2590
Miura, Satoshi Yokohama, JP 125 979

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