CONSUMABLE INTERFACE PLATE FOR TOOL INSTALL
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United States of America Patent
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app pub date -
Dec 19, 2014
filing date -
Aug 19, 2014
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Abstract
An apparatus including an interface operable to be connected to a pedestal or a raised floor for an integrated circuit tool, the interface containing a plurality of openings for utility connections on an input side and on an output side of the interface. An apparatus including an interface operable to be connected to a pedestal or a raised floor and containing a plurality of openings for utility connections on an input side and on an output side of the interface; connectors connected through respective openings in the interface, the connectors operable for connection to a respective utility; and a tool coupled to respective ones of the connectors. A method including coupling one or more utilities from a source to an input side of an interface coupled to a pedestal; and coupling a tool to the one or more utilities at an output side of the interface.
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