PIEZOELECTRIC DEVICE, PIEZOELECTRIC MODULE, AND ELECTRONIC APPARATUS
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United States of America Patent
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Issued Date -
Jun 1, 2017
app pub date -
Nov 14, 2016
filing date -
Nov 30, 2015
priority date (Note) -
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Abstract
A piezoelectric device includes an element substrate that includes a first surface (operating surface) and a second surface (back surface) on a side opposite to the first surface, and includes a recessed opening provided on the first surface and a supporting portion surrounding the recessed opening, a piezoelectric body that is provided on the second surface of the recessed opening, a plurality of connection electrodes (lower connection electrode and upper connection electrode) that are connected to the piezoelectric body and are drawn to the second surface of the supporting portion from the piezoelectric body, a reinforcement plate that is bonded to the second surface side of the element substrate, and a plurality of through electrodes that are provided at a position of the reinforcement plate which faces the supporting portion, pass through the reinforcement plate in a thickness direction, and are respectively connected to the plurality of connection electrodes.
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