Imprint apparatus and method for producing article
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United States of America Patent
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Aug 11, 2020
Grant Date -
Jun 8, 2017
app pub date -
Nov 28, 2016
filing date -
Dec 3, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
An imprint apparatus, to perform an imprinting process for bringing a mold and an imprint material on a substrate into contact with each other and curing the imprint material, includes a substrate deforming mechanism and a controller. The substrate deforming mechanism deforms the substrate in such a manner that a surface geometry of at least part of the substrate protrudes toward the mold. The controller determines a condition for the imprinting process on a shot area of the substrate based on the surface geometry of the shot area when the mold is brought into contact with the imprint material on the shot area.
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