ADDITIONAL SURFACE FOR STABILIZING THE INTERNAL CAVITY PRESSURE OVER THE LIFETIME
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United States of America Patent
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Jun 8, 2017
app pub date -
Dec 5, 2016
filing date -
Dec 8, 2015
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Abstract
A method for manufacturing a micromechanical component including a substrate and including a cap, which is connected to the substrate and, together with the substrate, encloses a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity. An access opening connecting the first cavity to surroundings of the micromechanical component is formed in the substrate or in the cap. The first pressure and/or the first chemical composition is adjusted. The access opening is sealed by introducing energy or heat into an absorbing part of the substrate or the cap with the aid of a laser. A getter material is deposited on or grown on a surface of the substrate facing the first cavity and/or a surface of the cap facing the first cavity for further adjustment of the first pressure and/or of the first chemical composition.
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