Elongating a travel path of a light beam by an optical delay device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10739572
APP PUB NO 20170160527A1
SERIAL NO

15434487

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Methods, devices, and systems for elongating a beam path of a light beam, in particular of a laser beam, are provided. An example method includes coupling the light beam into an interspace between a plurality of first reflective surfaces and a plurality of second reflective surfaces facing the first reflective surfaces, multiply reflecting the light beam between the first reflective surfaces and the second reflective surfaces to elongate the beam path of the light beam, and coupling out the light beam from the interspace. The light beam undergoes the steps of coupling in, repeated reflecting and coupling out at least a first time with a first pass and a second time with a second pass, and the light beam traverses a different beam path in the interspace during the first pass in comparison with during the second pass.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING GMBH71254 DITZINGEN

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Schulz, Joachim Gerlingen, DE 57 633

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Feb 11, 2028
11.5 Year Payment $7400.00 $3700.00 $1850.00 Feb 11, 2032
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00