SYSTEM AND METHOD FOR PROVIDING HERMETICALLY SEALED PACKAGES WITH CONSISTENT VACUUM CAVITY

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United States of America Patent

SERIAL NO

14967007

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Abstract

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A method of forming a plurality of sealed packages comprises providing a base including a base surface; providing a lid including a lid surface; positioning a plurality of spaced apart seal members along the base surface, the seal members being formed from a seal material including a fusible metal alloy; positioning the lid on the base with a plurality of spaced apart spacers positioned and extending between the base surface and the lid surface, the spacers maintaining the lid surface spaced apart from the seal members by a fluid gap, the spacers being made from a spacer material including a fusible metal alloy; creating a controlled environment around the base and the lid; and heating to melt the spacers and the seal material so that the seal members form a plurality of seal rings between the base surface and the lid surface.

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Patent Owner(s)

Patent OwnerAddress
INTEGRATED DEVICE TECHNOLOGY INC6024 SILVER CREEK VALLEY ROAD SAN JOSE CA 95138

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kulkarni, Srikanth Freemont, US 9 14
Patel, Viresh P Austin, US 5 4

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