POLYSILICON PREPARATION APPARATUS FOR PREVENTING GROUND FAULT CURRENT AND HAVING EXCELLENT EFFECT OF REMOVING SILICON DUST
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United States of America Patent
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Jun 15, 2017
app pub date -
Dec 9, 2016
filing date -
Dec 9, 2015
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Abstract
The present disclosure relates to a polysilicon preparation apparatus for preventing ground fault current and having an excellent effect of removing silicon dust. The polysilicon preparation apparatus includes a chamber comprising a housing with an opened lower portion and a base plate coupled to the lower portion of the housing, and a ceramic particle layer on an upper surface of the base plate, for preventing silicon dusts generated during a process from directly contacting the base plate and to be removed together with silicon dusts after the process.
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