BAW sensor device with peel-resistant wall structure
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United States of America Patent
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Jun 25, 2019
Grant Date -
Jun 15, 2017
app pub date -
Dec 13, 2016
filing date -
Dec 14, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
Lateral boundaries of a fluidic passage of a fluidic device incorporating at least one BAW resonator structure are fabricated with photosensitive materials (e.g., photo definable epoxy, solder mask resist, or other photoresist), allowing for high aspect ratio, precisely dimensioned walls. Resistance to delamination and peeling between a wall structure and a base structure is enhanced by providing a wall structure that includes a thin footer portion having a width that exceeds a width of an upper wall portion extending upward from the footer portion, and/or by providing a wall structure arranged over at least one anchoring region of a base structure. Anchoring features may include recesses and/or protrusions.
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