SYSTEM AND METHOD FOR IMPROVING DICING QUALITY FOR BONDED WAFER PAIRS

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United States of America Patent

SERIAL NO

14967050

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Abstract

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A method for manufacturing a plurality of die pairs includes providing a first wafer including a plurality of spaced apart first dies arranged in a first array including a first, first die row and a second, first die row spaced apart by a first portion of a first row channel; providing a second wafer including a plurality of spaced apart second dies arranged in a second array including a first, second die row and a second, second die row spaced apart by a second portion of the first row channel; connecting the first wafer to the second wafer with a connector assembly to form a wafer pair such that the first dies and the second dies cooperate to form the plurality of die pairs; positioning a first support assembly between the first wafer and the second wafer to rigidly support the first wafer relative to the second wafer; and cutting along the first row channel with a blade to separate the plurality of die pairs from one another.

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Patent Owner(s)

Patent OwnerAddress
INTEGRATED DEVICE TECHNOLOGY INC6024 SILVER CREEK VALLEY ROAD SAN JOSE CA 95138

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kulkarni, Srikanth Freemont, US 9 14
Patel, Viresh P Austin, US 5 4

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