Bulk acoustic wave resonator with a modified outside stack portion

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United States of America Patent

PATENT NO 10778180
APP PUB NO 20170170801A1
SERIAL NO

15375846

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Abstract

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Bulk Acoustic Wave (BAW) resonators that include a modified outside stack portion and methods for fabricating such BAW resonators are provided. One BAW resonator includes a reflector, a bottom electrode, a piezoelectric layer, and a top electrode. An active region is formed where the top electrode overlaps the bottom electrode and an outside region surrounds the active region. The piezoelectric layer includes a top surface adjacent to the top electrode and a bottom surface adjacent to the bottom electrode. The piezoelectric layer further includes an outside piezoelectric portion in the outside region with a bottom surface in the outside region that is an extension of the bottom surface of the piezoelectric layer, and the outside piezoelectric portion includes an angled sidewall that resides in the outside region and extends from the top surface of the piezoelectric layer to the bottom surface of the outside piezoelectric portion in the outside region.

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Patent Owner(s)

Patent OwnerAddress
QORVO US INC7628 THORNDIKE ROAD GREENSBORO NC 27409

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fattinger, Gernot Sorrento, US 32 413
Rothemund, Ralph Apopka, US 5 5
Stokes, Paul Orlando, US 47 453
Tajic, Alireza Winter Springs, US 17 53

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