Charged particle beam apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10236159
APP PUB NO 20170178858A1
SERIAL NO

15448308

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Abstract

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A charged particle beam includes: a computer that controls a needle actuating mechanism so as to approach a needle to a sample piece using a template formed from an absorbed current image obtained by irradiating the needle with a charged particle beam and a tip coordinate of the needle acquired from a secondary electron image obtained by irradiating the needle with the charged particle beam.

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Patent Owner(s)

  • HITACHI HIGH-TECH SCIENCE CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Asahata, Tatsuya Tokyo, JP 54 193
Sato, Makoto Tokyo, JP 725 7901
Tomimatsu, Satoshi Tokyo, JP 79 1528
Uemoto, Atsushi Tokyo, JP 45 292
Yamamoto, Yo Tokyo, JP 27 151

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