Showerhead having a detachable gas distribution plate

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United States of America Patent

PATENT NO 10625277
SERIAL NO

15449239

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Abstract

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Embodiments of showerheads having a detachable gas distribution plate are provided herein. In some embodiments, a showerhead for use in a substrate processing chamber includes a body having a first side and an opposing second side; a gas distribution plate disposed proximate the second side of the body; and a clamp disposed about a peripheral edge of the gas distribution plate to removably couple the gas distribution plate to the body, wherein the body is electrically coupled to the gas distribution plate through the clamp.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Banda, Sumanth San Jose, US 26 708
Della, Rosa Jason Campbell, US 11 371
Knyazik, Vladimir Palo Alto, US 29 565
Lubomirsky, Dmitry Cupertino, US 294 27217
Noorbakhsh, Hamid Fremont, US 69 2008
Sun, Jennifer Y Mountain View, US 254 11372
Ye, Zheng John Santa Clara, US 45 908

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