High mobility transport layer structures for rhombohedral Si/Ge/SiGe devices

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United States of America Patent

PATENT NO 10256305
APP PUB NO 20170179233A1
SERIAL NO

15449449

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Abstract

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An electronic device includes a trigonal crystal substrate defining a (0001) C-plane. The substrate may comprise Sapphire or other suitable material. A plurality of rhombohedrally aligned SiGe (111)-oriented crystals are disposed on the (0001) C-plane of the crystal substrate. A first region of material is disposed on the rhombohedrally aligned SiGe layer. The first region comprises an intrinsic or doped Si, Ge, or SiGe layer. The first region can be layered between two secondary regions comprising n+doped SiGe or n+doped Ge, whereby the first region collects electrons from the two secondary regions.

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  • THE UNITED STATES OF AMERICA AS REPRESENTED BY THE ADMINISTRATOR OF NASA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Sang Hyouk Poquoson, US 27 163
Kim, Hyun-Jung Poquoson, US 131 1023
King, Glen C Williamsburg, US 29 252
Lee, Kunik Troy, US 9 36
Park, Yeonjoon Yorktown, US 38 277

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