Method to reduce frequency distribution of bulk acoustic wave resonators during manufacturing

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United States of America Patent

PATENT NO 10135415
APP PUB NO 20170179914A1
SERIAL NO

14973958

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Abstract

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A method of tuning the resonant frequency of embedded bulk acoustic resonators during manufacturing of an integrated circuit. The rate of change in the resonant frequency of BAWs vs rate of change in top electrode thickness is determined and used to tune the resonant frequency of embedded bulk acoustic resonators during integrated circuit manufacturing.

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Patent Owner(s)

  • AGILENT TECHNOLOGIES TEXAS INSTRUMENTS INCORPORATED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dellas, Nicholas Stephen Dallas, US 11 12
Mirgorodski, Iouri Sunnyvale, US 6 24
Soman, Joel Dallas, US 7 14

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