SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

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United States of America Patent

APP PUB NO 20170200686A1
SERIAL NO

15149038

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Disclosed are a semiconductor device and a manufacturing method thereof, which can easily increase the number of input/output pads by increasing regions for forming the input/output pads such that a redistribution layer is formed to extend up to an encapsulant. In one embodiment, the manufacturing method includes preparing a wafer by sequentially forming an oxide layer, a semiconductor layer and a back end of line (BEOL) layer on a wafer substrate, dicing the wafer to divide the wafer into individual semiconductor chips, mounting the semiconductor chip on one surface of a carrier by flipping the semiconductor chips and removing the wafer substrate from the semiconductor chips, encapsulating the one surface of the carrier and the semiconductor chips using an encapsulant and then removing the carrier, forming a redistribution layer to be electrically connected to the BEOL layer exposed to the outside while removing the carrier, and forming conductive bumps to be electrically connected to be electrically connected to the redistribution layer.

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Patent Owner(s)

Patent OwnerAddress
AMKOR TECHNOLOGY SINGAPORE HOLDING PTE LTD491B RIVER VALLEY ROAD VALLEY POINT #12-03 SINGAPORE 248373

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kang, Sung Geun Bucheon-si, KR 11 49
Kim, In Rak Incheon, KR 1 7
Yoon, Ju Hoon Namyangju-si, KR 31 541

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