Vapor deposition apparatus and techniques using high puritiy polymer derived silicon carbide

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United States of America Patent

PATENT NO 10753010
APP PUB NO 20170204532A1
SERIAL NO

15275055

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Abstract

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Organosilicon chemistry, polymer derived ceramic materials, and methods. Such materials and methods for making polysilocarb (SiOC) and Silicon Carbide (SiC) materials having 3-nines, 4-nines, 6-nines and greater purity. Vapor deposition processes and articles formed by those processes utilizing such high purity SiOC and SiC.

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Patent Owner(s)

  • PALLIDUS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Land, Mark S Houston, US 47 935

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