Shielded probe systems

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10060950
APP PUB NO 20170205446A1
SERIAL NO

14997345

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Shielded probe systems are disclosed herein. The probe systems are configured to test a device under test (DUT) and include a measurement chamber that at least partially bounds an enclosed volume, an aperture defined by the measurement chamber, a probing assembly, and a shielding structure. The probing assembly includes a probe, which is oriented within the enclosed volume, a probe arm, which is operatively attached to the probe, and a manipulator, which is operatively attached to the probe arm. At least a portion of the probing assembly extends through the aperture. The shielding structure extends between the measurement chamber and the probing assembly and is configured to restrict fluid flow through the aperture and shield the enclosed volume from an ambient environment that surrounds the measurement chamber while maintaining at least a threshold separation distance from the probe arm throughout a probe arm range-of-motion thereof.

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Patent Owner(s)

  • FORMFACTOR BEAVERTON, INC.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bolt, Bryan Conrad Beaverton, US 3 10
Frankel, Joseph George Beaverton, US 9 19
Ingram-Goble, Robbie Portland, US 7 229
Negishi, Kazuki Beaverton, US 18 54
Simmons, Michael E Colton, US 12 54
Storm, Christopher Anthony Hillsboro, US 2 3

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