Deposition apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10738380
APP PUB NO 20170211179A1
SERIAL NO

15480870

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Abstract

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A deposition apparatus includes a chamber, a holding unit configured to hold a substrate in the chamber, a driving unit configured to move the holding unit holding the substrate such that the substrate passes through a deposition area in the chamber, a deposition unit configured to form a film on the substrate passing through the deposition area by supplying a deposition material to the deposition area, and a cooling unit configured to cool the holding unit.

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Patent Owner(s)

Patent OwnerAddress
CANON ANELVA CORPORATIONKAWASAKI

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ishihara, Masahito Fuchu, JP 19 490
Matsuki, Nobuo Kawasaki, JP 58 10266
Nozawa, Naoyuki Inagi, JP 13 106
Sakamoto, Reiji Hino, JP 5 2

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