Piezoelectric element, liquid ejecting head, and piezoelectric element device
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United States of America Patent
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Apr 24, 2018
Issued Date -
N/A
app pub date -
Jan 26, 2017
filing date -
Feb 3, 2016
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
Provided are a vibrating plate, a first electrode provided over the vibrating plate, a piezoelectric layer provided over the first electrode, and a second electrode provided over the piezoelectric layer are provided. The piezoelectric layer is interposed between the first electrode and the second electrode. The piezoelectric layer includes an active portion of which at least one end portion is defined by the first electrode, and a non-active portion provided on an outside of the end portion of the first electrode for defining the active portion. The vibrating plate includes a first vibration portion under the non-active portion and a second vibration portion on an outside of the first vibration portion. The second vibration portion includes a taper part having the thickness which is increased toward the first vibration portion.
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