Method of manufacturing piezoelectric device
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United States of America Patent
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Apr 30, 2019
Grant Date -
Aug 3, 2017
app pub date -
Jan 30, 2017
filing date -
Feb 2, 2016
priority date (Note) -
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Abstract
A method is provided for manufacturing a piezoelectric device including a piezoelectric element that is disposed above a diaphragm and that has a multilayer structure including a first electrode disposed above the diaphragm, a piezoelectric layer disposed on the first electrode, and a second electrode disposed on the piezoelectric layer. The method includes forming the multilayer structure including the first electrode, the piezoelectric layer, and the second electrode above the diaphragm, forming a voltage application electrode extending outwardly from an end of the second electrode to cover a region located above the piezoelectric layer in an inactive section having no second electrode, applying a voltage between the first electrode and the second electrode, and removing the voltage application electrode.
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