Spectroscopic measurement apparatus, driving circuit, and spectroscopic measurement method

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United States of America Patent

PATENT NO 10175108
APP PUB NO 20170219432A1
SERIAL NO

15413733

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Abstract

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A spectroscopic measurement apparatus includes a wavelength variable interference filter and a driving circuit. The wavelength variable interference filter includes a fixed reflection film, a movable reflection film that faces the fixed reflection film, and an electrostatic actuator that changes a distance between the fixed reflection film and the movable reflection film. The driving circuit drives the electrostatic actuator in such a way that the distance between the fixed reflection film and the movable reflection film changes at a uniform velocity.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kuri, Ryohei Matsumoto, JP 20 57

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