Importance

Loading Importance Indicators...

Abstract

A gyro sensor element includes a base, driving vibrating arms, which extend from the base, have a first surface and a second surface located on an opposite side to the first surface, and make a driving vibration, and detecting vibrating arms, which extend from the base, have a third surface located on a same side as the first surface and a fourth surface located on an opposite side to the third surface, and vibrate in accordance with a physical quantity applied to the driving vibrating arms, wherein the driving vibrating arms have bottomed grooves on at least one of the first surface and the second surface, and driving electrodes disposed on inner surfaces of the bottomed grooves, and the detecting vibrating arms have through holes penetrating the detecting vibrating arms in a direction crossing the third surface and the fourth surface, and detecting electrodes disposed on at least a part of an inner wall surface of the through holes.

Loading the Abstract Image...

First Claim