Detection circuit, electrostatic holding device and method for detecting a component on an electrostatic holding device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10388551
APP PUB NO 20170236736A1
SERIAL NO

15430427

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Detection circuit for detecting electrical capacitance of electrode device in electrostatic holding device with clamp carrier, particularly for detecting component held by holding device, includes phase control circuit couplable to electrode device and has reference oscillator device, phase comparator and VCO circuit (VCOC). Phase comparator is arranged to generate a control voltage of VCOC as a function of reference signal from reference oscillator device and of VCO feedback signal from VCOC, at least one phase control circuit is configured for controlling VCOC as a function of capacitance to be detected, and for outputting an output signal characteristic of capacitance based on control voltage of VCOC, phase control circuit is configured for connection to electrode device such that VCOC contains capacitance to be detected as frequency-determining component, and reference oscillator device is configured for generating reference signal with adjustable reference frequency. Electrostatic holding device includes at least one such detection circuit.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VDE RUN 6501 VELDHOVEN NL - 5504 DR

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fall, Michael Berlin, DE 4 3
Heinze, Gunnar Luebbenau, DE 2 1
Preuss, Peter Gosen-Neu Zittau, DE 6 21
Stein, Alexander Berlin, DE 127 1151

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Feb 20, 2027
11.5 Year Payment $7400.00 $3700.00 $1850.00 Feb 20, 2031
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00