High speed substrate aligner apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11508597
APP PUB NO 20170236739A1
SERIAL NO

15465326

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A substrate aligner providing minimal substrate transporter extend and retract motions to quickly align substrate without back side damage while increasing the throughput of substrate processing. In one embodiment, the aligner having an inverted chuck connected to a frame with a substrate transfer system capable of transferring substrate from chuck to transporter without rotationally repositioning substrate. The inverted chuck eliminates aligner obstruction of substrate fiducials and along with the transfer system, allows transporter to remain within the frame during alignment. In another embodiment, the aligner has a rotatable sensor head connected to a frame and a substrate support with transparent rest pads for supporting the substrate during alignment so transporter can remain within the frame during alignment. Substrate alignment is performed independent of fiducial placement on support pads. In other embodiments the substrate support employs a buffer system for buffering substrate inside the apparatus allowing for fast swapping of substrates.

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Patent Owner(s)

  • BROOK AUTOMATION US, LLC

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bottomley, Todd Chesterfield, US 5 33
Gilchrist, Ulysses Reading, US 97 1660
Hosek, Martin Lowell, US 163 2956
Moura, Jairo T Marlboro, US 39 187

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