Variable depth edge ring for etch uniformity control

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10651015
APP PUB NO 20170236741A1
SERIAL NO

15422823

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A substrate support includes an inner portion arranged to support a substrate, an edge ring surrounding the inner portion, and a controller that calculates a desired pocket depth of the substrate support. Pocket depth corresponds to a distance between an upper surface of the edge ring and an upper surface of the substrate. Based on the desired pocket depth, the controller selectively controls an actuator to raise and lower at least one of the edge ring and the inner portion to adjust the distance between the upper surface of the edge ring and the upper surface of the substrate.

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First Claim

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Angelov, Ivelin San Jose, US 18 953
Larson, Dean Pleasanton, US 3 81
Severson, Brian Queen Creek, US 12 637
Siladie, Cristian Castro Valley, US 4 99

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