Imprint apparatus, method for manufacturing article, and exposure apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10889052
APP PUB NO 20170246792A1
SERIAL NO

15436635

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Abstract

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There is provided an imprint apparatus for forming a pattern of an imprint material on a substrate by using a mold, the imprint apparatus including a mold holding unit configured to hold the mold, and a substrate holding unit configured to hold the substrate, in which a particle is captured by generating a first region and a second region charged to different polarities in at least either one of a peripheral region of a region covered by the mold of the mold holding unit and a peripheral region of a region covered by the substrate of the substrate holding unit.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Matsuoka, Yoichi Shioya-gun, JP 19 35
Yonekawa, Masami Utsunomiya, JP 23 214

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