Efficient thermo-optic phase shifters using multi-pass heaters

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United States of America Patent

PATENT NO 9946099
SERIAL NO

15596880

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Abstract

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Techniques for increasing efficiency of thermo-optic phase shifters using multi-pass heaters and thermal bridges are provided. In one aspect, a thermo-optic phase shifter device includes: a plurality of optical waveguides formed in an SOI layer over a buried insulator; at least one heating element adjacent to the optical waveguides; and thermal bridges connecting at least one of the optical waveguides directly to the heating element. A method for forming a thermo-optic phase shifter device is also provided.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINE CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gill, Douglas M South Orange, US 64 521
Xiong, Chi Yorktown Heights, US 12 42

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