Coater with automatic cleaning function and coater automatic cleaning method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10816901
APP PUB NO 20170248848A1
SERIAL NO

15511547

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A coater with automatic cleaning function and a coater automatic cleaning method. The coater (100,200,300,400,500,600,700,800) includes a coater chamber (101,201,301,401,501,601,701,801) capable of being filled up with cleaning solution, a substrate chuck (102,202,302,402,502,602,702,802) holding and positioning a substrate (103,203,303,403,503,603,703,803), and at least one shroud (108,208,308,408,508) capable of moving up for preventing photoresist from splashing out of the coater chamber (101,201,301,401,501,601,701,801), or moving down and immersing into the cleaning solution for cleaning. The coater (100,200,300,400,500,600,700,800) automatic cleaning method includes the following steps: turning off a liquid outlet valve (118,218,318,418A,418B,518,532,618,718,818) of the coater (100,200,300,400,500,600,700,800); filling up a coater chamber (101,201,301,401,501,601,701,801) with cleaning solution; after photoresist in the coater chamber (101,201,301,401,501,601,701,801) being dissolved into the cleaning solution, turning on the liquid outlet valve (118,218,318,418A,418B,518,532,618,718,818) and draining the cleaning solution out of the coater chamber (101,201,301,401,501,601,701,801).

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Patent Owner(s)

Patent OwnerAddress
ACM RESEARCH (SHANGHAI) INCBUILDING 4 NO 1690 CAI LUN ROAD CHINA (SHANGHAI) PILOT FREE TRADE ZONE PUDONG NEW AREA SHANGHAI 201203 201203

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Fufa Shanghai, CN 30 893
Chen, Fuping Shanghai, CN 45 43
Nuch, Voha Shanghai, CN 13 115
Wang, Hui Shanghai, CN 1115 8921
Wang, Jian Shanghai, CN 1906 17240
Wang, Wenjun Shanghai, CN 67 121
Yang, Hongchao Shanghai, CN 24 2
Yang, Shu Shanghai, CN 86 1359
Zhang, Xiaoyan Shanghai, CN 147 1153

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