Trench metal insulator metal capacitor with oxygen gettering layer

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9911597
SERIAL NO

15595503

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A method including forming an oxygen gettering layer on one side of an insulating layer of a deep trench capacitor between the insulating layer and a substrate, the oxygen gettering layer including an aluminum containing compound, and depositing an inner electrode on top of the insulating layer, the inner electrode including a metal.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ando, Takashi Tuckahoe, US 717 5552
Cartier, Eduard A New York, US 89 1896
Chudzik, Michael P Sunnyvale, US 140 2521
Dasgupta, Aritra Wappingers Falls, US 21 115
Ho, Herbert L New Windsor, US 96 1934
Kang, Donghun Hopewell Junction, US 16 123
Krishnan, Rishikesh Painted Post, US 53 244
Narayanan, Vijay New York, US 308 5551
Rim, Kern Yorktown Heights, US 191 2713

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Sep 6, 2025
11.5 Year Payment $7400.00 $3700.00 $1850.00 Sep 6, 2029
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00