SLURRY COMPOSITION, USE THEREOF, AND POLISHING METHOD

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Jun 8, 2016
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Mar 1, 2016

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Abstract

Provided is a slurry composition including abrasive particles, halogen oxide, and nitroxide compound. The combination of halogen oxide and nitroxide compound has a synergistic effect to remove a substrate containing tungsten and silicon oxide. Moreover, a use of the slurry composition and a polishing method using the slurry composition are provided.

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UWIZ TECHNOLOGY CO LTD	NO 33 DONGYUAN ROAD ZHONG-LI DISTRICT TAOYUAN CITY

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Inventor Name	Address	# of filed Patents	Total Citations
Chang, Song-Yuan	Chiayi County, TW	17	105
Chiang, Chung-Wei	Taoyuan City, TW	12	41
Ho, Ming-Che	Taoyuan City, TW	132	1332
Ho, Yun-Lung	Miaoli County, TW	8	21
Lu, Ming-Hui	Taipei City, TW	10	36

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SLURRY COMPOSITION, USE THEREOF, AND POLISHING METHOD

Number of patents in Portfolio can not be more than 2000

United States of America Patent

15176162

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15176162

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