Shutter unit, lithography apparatus, and method of manufacturing article

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9971248
APP PUB NO 20170255106A1
SERIAL NO

15444418

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A shutter unit that opens and closes an optical path of light for a lithography apparatus is provided. The shutter unit includes a motor which rotatably drives a shaft extended along a rotation axis of the motor, and a plurality of shutter members attached to the shaft, each including a light shielding portion and a light transmissive portion. The shutter unit further includes a partition plate arranged at a location between the shutter members to avoid a portion through which a light beam passes and configured to shield light that has leaked from a front stage shutter member.

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First Claim

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hatamoto, Atsushi Utsunomiya, JP 1 1

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