MEASUREMENT APPARATUS, SYSTEM, MEASUREMENT METHOD, AND ARTICLE MANUFACTURING METHOD
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United States of America Patent
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Sep 7, 2017
app pub date -
Mar 1, 2017
filing date -
Mar 2, 2016
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Abstract
A measurement apparatus including an imaging device configured to perform imaging of an object to output image information, and perform measurement of arrangement of the object in a state where at least one of the object and the imaging device is moving, comprising: a processor configured to obtain information of the arrangement based on the output image information, wherein the processor is configured to perform a process of synchronization between the imaging and measurement of a position of the at least one.
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