Methods and Systems for Creating or Performing a Dynamic Sampling Scheme for a Process During Which Measurements Are Performed on Wafers

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United States of America Patent

SERIAL NO

15597098

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Abstract

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Various methods and systems for creating or performing a dynamic sampling scheme for a process during which measurements are performed on wafers are provided. One method for creating a dynamic sampling scheme for a process during which measurements are performed on wafers includes performing the measurements on all of the wafers in at least one lot at all measurement spots on the wafers. The method also includes determining an optimal sampling scheme, an enhanced sampling scheme, a reduced sampling scheme, and thresholds for the dynamic sampling scheme for the process based on results of the measurements. The thresholds correspond to values of the measurements at which the optimal sampling scheme, the enhanced sampling scheme, and the reduced sampling scheme are to be used for the process.

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Patent Owner(s)

Patent OwnerAddress
KLA-TENCOR CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Adel, Mike Zichron Ya'akov, IL 21 451
Choi, Dongsub Bundang-ku Sungnam City, KR 16 189
Izikson, Pavel Haifa, IL 14 399
Marchelli, Anat Migdal Haemek, IL 4 80
Robinson, John Austin, US 98 1305
Widmann, Amir Sunnyvale, US 18 301

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