Method for preparing synthetic quartz glass substrate

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United States of America Patent

PATENT NO 10737966
APP PUB NO 20170260081A1
SERIAL NO

15452910

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Abstract

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Synthetic quartz glass substrates are prepared by furnishing a synthetic quartz glass block, coating two opposed surfaces of the glass block with a liquid having a transmittance of at least 99.0%/mm at a birefringence measuring wavelength, measuring a birefringence of the glass block by directing light thereacross, determining a slice thickness on the basis of the birefringence measurement and the dimensions of the substrate, and slicing the glass block at the determined slice thickness.

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Patent Owner(s)

Patent OwnerAddress
SHIN-ETSU CHEMICAL CO LTD6-1 OHTEMACHI 2-CHOME CHIYODA-KU TOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Harada, Daijitsu Joetsu, JP 43 67
Ishitsuka, Yoko Joetsu, JP 5 1
Takeuchi, Masaki Joetsu, JP 166 1188
Watabe, Atsushi Joetsu, JP 20 66

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