Quartz crystal microbalance assembly for ALD systems
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United States of America
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Issued Date -
Sep 14, 2017
app pub date -
Feb 17, 2017
filing date -
Feb 17, 2017
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Abstract
A quartz crystal microbalance assembly includes a lid of a reactor chamber of an ALD system. A QCM crystal is disposed in a bottom section of a central cavity formed in the lid. A central portion of a front surface of the QCM crystal is exposed to an interior of the reactor chamber. A retainer arranged within the central cavity and above the QCM crystal presses the QCM crystal against a ledge in the lid to form a seal between the front surface of the QCM crystal and the ledge while also establishing electrical contact with the QCM crystal. A flange resides immediately adjacent a top surface of the lid and seals the central cavity while supporting electrical contact with the QCM crystal through the retainer. A transducer external to the reactor chamber and in electrical contact with the QCM crystal through a connector in the flange drives the QCM crystal.
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