Substrate processing apparatus and control method of substrate processing apparatus

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United States of America Patent

PATENT NO 10115615
APP PUB NO 20170263477A1
SERIAL NO

15219708

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Abstract

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According to one embodiment, there is provided a substrate processing apparatus including a processing unit and a manipulator. The processing unit processes a substrate. The manipulator is for maintenance. The manipulator is placed near the processing unit.

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Patent Owner(s)

  • TOSHIBA MEMORY CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Eto, Hideo Yokkaichi, JP 34 444

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