Capacitive force sensor with diaphragm body having an extending free end forming a cantilever portion
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United States of America Patent
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May 29, 2018
Issued Date -
N/A
app pub date -
Nov 9, 2015
filing date -
Dec 5, 2014
priority date (Note) -
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Abstract
A capacitive force sensor includes a base body, a diaphragm body, two spacers arranged between the base body and the diaphragm body, the two spacers supporting the diaphragm body on the base body, a free end formed by the diaphragm body projecting beyond one of the two spacers, a cavity formed between the diaphragm body and the base body in a region between the two spacers so that the diaphragm body bends when a force acts on the diaphragm body in the region between the two spacers, a first electrode arranged at the free end, a second electrode arranged on the base body, and an electrical contact device which makes an electrical contact with the first and second electrode. The first and second electrode define a precision capacitance meter with a measuring capacitance which changes with an action of the force.
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