Test standards and methods for impedance calibration of a probe system, and probe systems that include the test standards or utilize the methods

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United States of America Patent

PATENT NO 10180486
APP PUB NO 20170269183A1
SERIAL NO

15072204

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Abstract

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Test standards and methods for impedance calibration of a probe system and probe systems that include the test standards and/or utilize the methods are disclosed herein. The test standards include at least one test structure. In some embodiments, the test standard further includes an alignment structure that is associated with the test structure. In some embodiments, the test standards include a plurality of test structures. In some embodiments, the plurality of test structures includes a thin film thru test structure and a thin film offset test structure. In some embodiments, the plurality of test structures is positioned to simultaneously contact a plurality of probe regions of a probe head. The methods include methods of calibrating a probe system.

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Patent Owner(s)

  • FORMFACTOR BEAVERTON, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bock, Daniel M Portland, US 2 4
Bui, Lynh Thuy Tigard, US 1 2
Nhim, Samantha Tigard, US 1 2

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