PRESSURE SENSOR, ALTIMETER, ELECTRONIC APPARATUS, AND VEHICLE
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United States of America Patent
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Sep 28, 2017
app pub date -
Mar 14, 2017
filing date -
Mar 28, 2016
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Abstract
A pressure sensor includes a diaphragm that flexurally deforms when pressurized, a plurality of piezoresistive elements provided in the diaphragm, and a plurality of temperature-sensitive elements provided in the diaphragm in correspondence with the plurality of piezoresistive elements, wherein a separation distance between the piezoresistive element and the temperature-sensitive element corresponding to each other is shorter than a separation distance between the piezoresistive element and the temperature-sensitive element not corresponding to each other. Further, each of the temperature-sensitive elements is provided to at least partially overlap with the corresponding piezoresistive element in a plan view of the diaphragm.
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