High brightness laser-sustained plasma broadband source

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United States of America Patent

PATENT NO 9865447
SERIAL NO

15285333

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Abstract

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The broadband light source includes a gas containment structure and a pump laser for generating a pump beam including illumination of a wavelength near that of a weak absorption line of a neutral gas contained in the gas containment structure. The broadband light source also includes anamorphic optics for focusing the pump beam into an elliptical beam waist positioned in or near the center of the gas containment structure. The broadband light source also includes collection optics for collecting broadband radiation emitted by the plasma in a direction aligned with a longer axis of the elliptical beam waist.

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Patent Owner(s)

  • KLA-TENCOR CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chuang, Yung-Ho Alex Cupertino, US 81 851
Fielden, John Los Altos, US 154 3758
Liou, Justin Santa Clara, US 2 17
Lu, Xiaoxu San Jose, US 10 66

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