Probe systems, storage media, and methods for wafer-level testing over extended temperature ranges

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United States of America Patent

PATENT NO 10060963
APP PUB NO 20170285083A1
SERIAL NO

15471199

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Abstract

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Probe systems, storage media, and methods for wafer-level testing over extended temperature ranges are disclosed herein. The methods are configured to test a plurality of devices under test (DUTs) present on a substrate. The probe systems are programmed to perform the methods. The storage media include computer-readable instructions that direct a probe system to perform the methods.

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Patent Owner(s)

  • FORMFACTOR BEAVERTON, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
McMullen, Timothy Allen Lino Lakes, US 2 2
Shepler, Jeffery Allan Vadnais Heights, US 1 2
Vander, Giessen Clint Beaverton, US 1 2

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