MEMS device oscillating about two axes and having a position detecting system, in particular of a piezoresistive type
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United States of America Patent
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Aug 14, 2018
Grant Date -
Oct 5, 2017
app pub date -
Sep 15, 2016
filing date -
Mar 31, 2016
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A MEMS device includes a platform carried by a frame via elastic connection elements configured to enable rotation of the platform about a first axis. A bearing structure supports the frame through first and second elastic suspension arms configured to enable rotation of the frame about a second axis transverse to the first axis. The first and second elastic suspension arms are anchored to the bearing structure through respective anchorage portions arranged offset with respect to the second axis. A stress sensor formed by first and second sensor elements respectively arranged on the first and second suspension arms is positioned in proximity of the anchorage portions, on a same side of the second axis, in a symmetrical position with respect to the first axis.
First Claim
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International Classification(s)
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- H04N:PICTORIAL COMMUNICATION, e.g. TELEVISION
- G01L:MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL ....
- G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G06F:ELECTRIC DIGITAL DATA PROCESSING
- H03H:IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONA....
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