METHOD OF MANUFACTURING ELECTRO-OPTICAL DEVICE, ELECTRO-OPTICAL DEVICE, AND ELECTRONIC APPARATUS
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United States of America Patent
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Oct 5, 2017
app pub date -
Mar 30, 2017
filing date -
Apr 4, 2016
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Abstract
In a step of forming an element substrate of an electro-optical device, a layered structure, which includes a plurality of films having a film that forms pixel switching elements and a film that forms holding capacitors, is formed on one surface of the substrate, and, thereafter, a lens surface and a lens layer are formed on a second surface of the layered structure. Subsequently, after the substrate is removed by polishing and etching, pixel electrodes are formed on a side of a first substrate, on which the substrate is located, of the layered structure. Therefore, the holding capacitors are provided on a side opposite to a side of the pixel electrodes (side of a counter substrate) for the pixel switching elements.
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