Solidly mounted layer thin film device with grounding layer

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United States of America Patent

PATENT NO 10938367
APP PUB NO 20170288629A1
SERIAL NO

15623856

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus includes a substrate, a thin film piezoelectric layer, a transducer, and a low resistivity layer. The thin film piezoelectric layer is over the substrate, the transducer includes a number of electrodes in contact with the thin film piezoelectric layer and configured to transduce an acoustic wave in the thin film piezoelectric layer. The low resistivity layer is between at least a portion of the substrate and the thin film piezoelectric layer. By providing the low resistivity layer between at least a portion of the substrate and the thin film piezoelectric layer, a spurious response of the apparatus may be significantly reduced, thereby improving the performance thereof.

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Patent Owner(s)

  • QORVO US, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bhattacharjee, Kushal Kernersville, US 31 1345
Zhgoon, Sergei Moscow, RU 7 320

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