Tool for annealing of magnetic stacks

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United States of America Patent

PATENT NO 10779363
APP PUB NO 20170290103A1
SERIAL NO

15625549

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Abstract

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In one embodiment of the invention, there is provided a tool for annealing a magnetic stack. The tool includes a housing defining a heating chamber; a holding mechanism to hold at least one wafer in a single line within the heating chamber, a heating mechanism to heat the at least one wafer; and a magnetic field generator to generate a magnetic field whole field lines pass through the single line of wafers during a magnetic annealing process; wherein the holding mechanism comprises a wafer support of holding the single line of wafers between the heating mechanism and the magnetic field generator.

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Patent Owner(s)

  • III HOLDINGS 1, LLC

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mani, Krishnakumar San Jose, US 54 185

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