Exposure method, exposure equipment and 3-D structure
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United States of America Patent
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Issued Date -
Oct 12, 2017
app pub date -
Oct 18, 2016
filing date -
Apr 8, 2016
priority date (Note) -
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status (Latency Note)
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Abstract
An exposure method is provided. The exposure method includes coating a photo-curable material on a substrate, and exposing a portion of the photo-curable material by providing a first light source through an optical fiber to form a first photo-cured material. The optical fiber includes a light output end and a cone portion that tapers toward the light output end. The photo-curable material not exposed by the first light source is removed while leaving the first photo-cured material. Exposure equipment for performing the exposure method and a 3-dimensional structure formed thereby are also described.
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